4/22/2010	9:56:59 AM	Bypass valve closed
4/22/2010	9:57:00 AM	Main Vac valve closed
4/22/2010	9:57:47 AM	Main Vac valve opened
4/22/2010	9:57:47 AM	Bypass valve opened
4/22/2010	10:03:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/22/2010	10:03:33 AM	Recipe started at 10:03 AM
4/22/2010	10:03:33 AM	H2 valve closed
4/22/2010	10:03:33 AM	BCl3 valve closed
4/22/2010	10:03:33 AM	PH3 valve closed
4/22/2010	10:03:33 AM	SiCl4 pre valve closed
4/22/2010	10:03:33 AM	SiCl4 post valve closed
4/22/2010	10:03:33 AM	Main Vac valve closed
4/22/2010	10:03:33 AM	Bypass valve closed
4/22/2010	10:03:33 AM	Bubbler valve closed
4/22/2010	10:03:33 AM	Helium valve opened
4/22/2010	10:03:33 AM	Helium MFC set to  500.000000
4/22/2010	10:03:33 AM	H2 MFC set to  0.000000
4/22/2010	10:03:33 AM	BCl3 MFC set to  0.000000
4/22/2010	10:03:33 AM	SiCl4 MFC set to  0.000000
4/22/2010	10:03:33 AM	Bypass solenoid MFC set to  0.000000
4/22/2010	10:03:33 AM	Tube furnace set to 0
4/22/2010	10:04:54 AM	Helium valve closed
4/22/2010	10:04:54 AM	H2 valve closed
4/22/2010	10:04:54 AM	BCl3 valve closed
4/22/2010	10:04:54 AM	PH3 valve closed
4/22/2010	10:04:54 AM	SiCl4 pre valve closed
4/22/2010	10:04:54 AM	SiCl4 post valve closed
4/22/2010	10:04:54 AM	Main Vac valve closed
4/22/2010	10:04:54 AM	Bypass valve closed
4/22/2010	10:04:54 AM	Bubbler valve closed
4/22/2010	10:04:54 AM	Helium MFC set to  0.000000
4/22/2010	10:04:54 AM	H2 MFC set to  0.000000
4/22/2010	10:04:54 AM	BCl3 MFC set to  0.000000
4/22/2010	10:04:54 AM	SiCl4 MFC set to  0.000000
4/22/2010	10:04:54 AM	Bypass solenoid MFC set to  0.000000
4/22/2010	10:04:54 AM	Tube furnace set to 0
4/22/2010	10:04:54 AM	Run finished at 10:04 AM
4/22/2010	10:04:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/22/2010	10:04:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/22/2010	10:04:59 AM	Recipe started at 10:04 AM
4/22/2010	10:04:59 AM	Helium valve closed
4/22/2010	10:04:59 AM	H2 valve closed
4/22/2010	10:04:59 AM	BCl3 valve closed
4/22/2010	10:04:59 AM	PH3 valve closed
4/22/2010	10:04:59 AM	SiCl4 pre valve closed
4/22/2010	10:04:59 AM	SiCl4 post valve closed
4/22/2010	10:04:59 AM	Main Vac valve closed
4/22/2010	10:04:59 AM	Bubbler valve closed
4/22/2010	10:04:59 AM	Bypass valve opened
4/22/2010	10:04:59 AM	Helium MFC set to  0.000000
4/22/2010	10:04:59 AM	H2 MFC set to  0.000000
4/22/2010	10:04:59 AM	BCl3 MFC set to  0.000000
4/22/2010	10:04:59 AM	SiCl4 MFC set to  0.000000
4/22/2010	10:04:59 AM	Bypass solenoid MFC set to  0.000000
4/22/2010	10:04:59 AM	Tube furnace set to 0
4/22/2010	10:05:29 AM	Helium valve closed
4/22/2010	10:05:29 AM	H2 valve closed
4/22/2010	10:05:29 AM	BCl3 valve closed
4/22/2010	10:05:29 AM	PH3 valve closed
4/22/2010	10:05:29 AM	SiCl4 pre valve closed
4/22/2010	10:05:29 AM	SiCl4 post valve closed
4/22/2010	10:05:29 AM	Bubbler valve closed
4/22/2010	10:05:29 AM	Main Vac valve opened
4/22/2010	10:05:29 AM	Bypass valve opened
4/22/2010	10:05:29 AM	Helium MFC set to  0.000000
4/22/2010	10:05:29 AM	H2 MFC set to  0.000000
4/22/2010	10:05:29 AM	BCl3 MFC set to  0.000000
4/22/2010	10:05:29 AM	SiCl4 MFC set to  0.000000
4/22/2010	10:05:29 AM	Bypass solenoid MFC set to  0.000000
4/22/2010	10:05:29 AM	Tube furnace set to 0
4/22/2010	10:05:29 AM	Run finished at 10:05 AM
4/22/2010	10:05:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
